SPM-Nanoa - Specs
Scanning Probe Microscope/Atomic Force Microscope
Wide Assortment of Expansion Functionality
SPM Unit
| Resolution | XY 0.2 nm |
|---|---|
| Z 0.01 nm | |
| SPM Head | Displacement detection system |
| Light source/Optical lever/Detector | |
| Light source | |
| Laser diode | |
| Detector | |
| Photodetector | |
| Scanner | Max. scanning size (X,Y,Z) |
| 10 μm x 10 μm x 1 μm (standard) 30 μm x 30 μm x 5 μm (optional) 125 μm x 125 μm x 1 μm (optional) 55 μm x 55 μm x 13 μm (optional) 2.5 μm x 2.5 μm x 0.3 μm (optional) |
|
| Sample Stage | Max. sample size |
| ø50 mm x 8 mm For 50 mm diameter samples, only the central area can be observed |
|
| Sample replacement method | |
| Sample stage drive method | |
| Sample securing method | |
| Magnet | |
| Max. scanning size | |
| ±5 mm When a 40 mm diameter or smaller sample is placed in the center of the scanner |
|
| Z-Axis Coarse Adjustment Mechanism |
Max. scanning size |
| 10 mm (electric) | |
| Optical Microscope Observation |
Total magnification rate |
| About 290 to 1700 times (when displayed on a 19-inch monitor) |
|
| Coarse adjustment | |
| X-Y: Manual Z: Electric (with auto-focus function) |
|
| Lighting | |
| Coaxial incident illumination (with automatic dimming function) |
|
| Status Indicator Vibration Damping |
Display |
| Operating status indicated by color | |
| Mechanism | Method |
| Internal gel damper |
2. Control Unit
| Scan Controller | X/Y-axis control | ±210 V, full time 16-bit accuracy | |
|---|---|---|---|
| Z-axis control | ±210 V, max. 26-bit accuracy | ||
| Communications Interface | Protocol | TCP/IP | |
Software
| Interface | Language | Select Japanese, English, or Chinese | |
|---|---|---|---|
| Online | Image data display | Maximum 8 images can be displayed simultaneously. | |
| Scanning size | 0.1 nm to max. scanning size (depending on scanner type) | ||
| Scan speed | 0.01 to 100 Hz (depending on observation parameters) | ||
| Observation pixels | 2 × 32 to 8192 × 8192 (rectangular scan possible at center of screen) | ||
| Scan parameter settings | Feedback gain, scan speed, and other settings can be set automatically | ||
| Data size | Approx. 128 MB to 64 kB/data | ||
| Offline | Summary display | Displays list of thumbnail images | |
| Image data display | Dimensions can be measured in grayscale (top view), three-dimensional, and other views | ||
| Image data processing | Flatten, erase noisy lines, local filter, spectrum filter, zoom, invert, and rotate image, resample, extract lines, use macro functions, etc. |
||
| Image data analysis | Profile analysis, line roughness analysis, surface roughness analysis, topography analysis, step measurement, power spectrum analysis, autocorrelation analysis, fractal analysis, line length analysis, line roughness analysis, particle analysis (optional), etc. |
||
| File output | DIB format (bitmap), TIFF format, ASCII format | ||
Data Processing Unit (Optional)
| Host Computer | OS |
|---|---|
| Windows® 10 Professional (64-bit) (Japanese version) | |
| Interface | |
| TCP/IP | |
| LCD | |
| 22-inch | |
| Monitor | Resolution |
| 1920 × 1080 |
